Technique for Stable Processing of Thin/Fragile Substrates

ABSTRACT

A semiconductor on insulator (SOI) wafer includes a semiconductor substrate having first and second main surfaces opposite to each other. A dielectric layer is disposed on at least a portion of the first main surface of the semiconductor substrate. A device layer has a first main surface and a second main surface. The second main surface of the device layer is disposed on a surface of the dielectric layer opposite to the semiconductor substrate. A plurality of intended die areas are defined on the first main surface of the device layer. The plurality of intended die areas are separated from one another. A plurality of die access trenches are formed in the semiconductor substrate from the second main surface. Each of the plurality of die access trenches are disposed generally beneath at least a respective one of the plurality of intended die areas.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation application of U.S. patentapplication Ser. No. 11/380,457, filed Apr. 27, 2006, currently pending,entitled, “Technique for Stable Processing of Thin/Fragile Substrates,”the contents of which are incorporated by reference herein.

BACKGROUND OF THE INVENTION

The present invention generally relates to a method of manufacturing asemiconductor device, and more particularly, to a method for using asilicon on insulator (SOI) semiconductor wafer for manufacturing deviceshaving very thin and fragile substrates.

Semiconductor wafer fabrication generally refers to the process ofmaking integrated circuits on silicon wafers. A typical semiconductorwafer is generally circular in plan view and has a diameter on the orderof 25-300 millimeters (mm). Individual electronic circuits or devicesare formed across at least one surface of the wafer and then the waferis typically cut (sawed or diced) into a plurality of individual “dies”for packaging into individual integrated circuits (ICs).

Silicon on insulator (SOI) semiconductors, dielectric isolation (DI)semiconductors and bonded wafer semiconductor devices are generallyknown in the art. For example, basic known processes to bondsemiconductor wafers include forming a layer of silicon dioxide on onesilicon wafer, sometimes referred to as the “handle wafer” and placingthe other wafer on the silicon dioxide and annealing (i.e., generallyheating to and holding at a suitable temperature and then cooling at asuitable rate) the stacked wafers to form a bonded wafer semiconductordevice having a buried oxide layer. Other methods of forming SOIsemiconductor wafers are also known.

A handle wafer can be used to handle a semiconductor wafer duringprocessing. Typically the device layer of semiconductor material isprocessed, e.g., trenched, implanted, doped, polished or the like, andis therefore moved from process to process. As device layers shrink orbecome more thin, they also become more fragile and hard to handleduring processing.

Wafer sawing or dicing is a processing step that actually cuts the waferinto individual dies for assembly into IC packages. The wafer sawprocess typically includes mounting the wafer to a frame, cutting thewafer through its thickness according to the programmed die dimensionsusing a diamond cutting wheel rotating at a very high speed and cleaningthe wafer using high pressure water spray. Alternately, wafers can bediced using a water-jet-guided laser. Improper wafer sawing can resultin cracks in the wafers which is often referred to as die cracking. Evenproper sawing may lead to die cracking in very thin wafers.

It is desirable to provide a technique to allow stable processing ofthin and fragile semiconductor substrates. It is desirable to provide amethod of manufacturing such thin semiconductor devices using SOI wafersand a deep trench etch. It is also desirable to provide a technique tomanufacture larger diameter wafers with a lower level of breakage and/ordie cracking.

BRIEF SUMMARY OF THE INVENTION

Briefly stated, an embodiment of the present invention relates to asemiconductor on insulator (SOI) wafer that includes a semiconductorsubstrate having first and second main surfaces opposite to each other.A dielectric layer is disposed on at least a portion of the first mainsurface of the semiconductor substrate. A device layer has a first mainsurface and a second main surface. The second main surface of the devicelayer is disposed on a surface of the dielectric layer opposite to thesemiconductor substrate. A plurality of intended die areas are definedon the first main surface of the device layer. The plurality of intendeddie areas are separated from one another. A plurality of die accesstrenches are formed in the semiconductor substrate from the second mainsurface. Each of the plurality of die access trenches are disposedgenerally at least partially beneath at least a respective one of theplurality of intended die areas.

Another embodiment of the present invention relates to a method ofmanufacturing semiconductor devices that includes providing a firstsemiconductor substrate having first and second main surfaces oppositeto each other. A dielectric layer is formed on the first main surface ofthe first semiconductor substrate. A second semiconductor substrate isprovided and the second semiconductor substrate has first and secondmain surfaces opposite to each other. The second semiconductor substrateis disposed on the dielectric layer opposite to the first semiconductorsubstrate. Portions of the first semiconductor substrate are selectivelyremoved to form a plurality of die access trenches in the second mainsurface of the first semiconductor substrate. Each of the plurality ofdie access trenches defines at least a respective one of a plurality ofintended die areas on the first main surface of the second semiconductorsubstrate.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The foregoing summary, as well as the following detailed description ofthe invention, will be better understood when read in conjunction withthe appended drawings. For the purpose of illustrating the invention,there are shown in the drawings embodiments which are presentlypreferred. It should be understood, however, that the invention is notlimited to the precise arrangements and instrumentalities shown. In thedrawings:

FIG. 1 is a partial cross sectional side elevational view of asemiconductor on insulator (SOI) wafer in accordance with preferredembodiments of the present invention;

FIG. 2 is a partial cross sectional side elevational view of the SOIwafer of FIG. 1 after at least one processing step has been applied to adevice layer;

FIG. 3 is a partial cross sectional side elevational view of the SOIwafer of FIG. 2 after a semiconductor substrate (handle wafer) has beenprocessed to include a plurality of die access trenches;

FIG. 4 is a top plane view of an SOI wafer having a plurality ofintended die areas or dies and a plurality of backside die accesstrenches associated therewith;

FIG. 5 is a greatly enlarged bottom plan view of the SOI wafer of FIG. 4showing saw/cut lines;

FIG. 6 is a greatly enlarged bottom plan view of an alternate embodimentof the SOI wafer of FIG. 5; and

FIG. 7 is a greatly enlarged bottom plan view of an alternate embodimentof the SOI wafer of FIG. 5.

DETAILED DESCRIPTION OF THE INVENTION

Certain terminology is used in the following description for convenienceonly and is not limiting. The words “right,” “left,” “lower,” and“upper” designate directions in the drawings to which reference is made.The words “inwardly” and “outwardly” refer to direction toward and awayfrom, respectively, the geometric center of the object described anddesignated parts thereof. The terminology includes the words abovespecifically mentioned, derivatives thereof and words of similar import.Additionally, the words “a” and “and” as used in the claims and in thecorresponding portion of the specification means “at least one.”

Although any particular embodiment of the present invention may refer toa particular conductivity (e.g., p-type or n-type), it will be readilyunderstood by those skilled in the art that p-type conductivity can beswitched with n-type conductivity and the device will still befunctionally correct (i.e., a first or second conductivity type).Therefore, where used herein, the reference to n-type may beinterchangeable with p-type and reference to p-type may beinterchangeable with n-type.

Referring to the drawings in detail, wherein like numerals referencelike elements throughout, there is shown in FIG. 1 an semiconductor oninsulator (SOI) wafer 10 for use with preferred embodiments of thepresent invention. The SOI wafer 10 includes a first semiconductorsubstrate or “handle wafer” 32, a dielectric layer or buried oxide layer35 and a second semiconductor substrate or device layer 24. The handlewafer 32 has a thickness of several hundred micrometers or microns (μm),e.g., a thickness of about 100-1000 μm. The dielectric or buried oxidelayer 35 has a thickness of about 0.1 to 5 μm. The device layer 24 has athickness of several microns, e.g., a thickness of 2-250 μm.

Generally, device layers 24 having a thickness of 100 μm or less will bevery fragile and will be well suited to handling during manufacturingusing the SOI wafer 10 to provide more stability during processing andsawing/dicing. More stability of fragile device layers 24 will lead tohigher production yields for a given size wafer dimension (e.g., 100 mm,200 mm, 300 mm, etc.). Additionally, providing more stability forfragile device layers 24 will permit using larger overall waferdimensions.

FIGS. 2-3 show steps for forming active devices in isolated regionsreferred to as intended die areas or actual dies 22 on the device layer24. At least one typical semiconductor processing step is performed onthe device layer 24 such as trenching, implanting, doping, etching,oxidizing or the like. For example, a transistor or photodiode may beformed in the device layer 24. For example, the device layer 24 may betrenched and the trench may be refilled with an oxide or otherdielectric 26 to form an isolation region or the device layer 24 may bemasked and selectively doped to form a drain region or source region 28.The type of device formed in the device layer 24 is not significant tothe embodiments of the present invention.

Optionally, the SOI wafer 10 is trenched to provide the plurality of dieaccess trenches 20, but the device layer 24 is provided as a “blank” forcustomer end-processing. A “mask template” can be provided to thecustomer which corresponds to the plurality of die access trenches 20 sothat the customer can customize any front-side device layer masks totheir custom purpose. For example, the first semiconductor substrate 32has first and second main surfaces 32 a, 32 b opposite to each other.The dielectric layer or buried oxide layer 35 is formed on the firstmain surface 32 a of the first semiconductor substrate 32. The secondsemiconductor substrate or device layer 24 is provided and the secondsemiconductor substrate 24 has first and second main surfaces 24 a, 24 bopposite to each other. The second semiconductor substrate 24 isdisposed on the dielectric layer 35 opposite to the first semiconductorsubstrate 32. Portions of the first semiconductor substrate 32 areselectively removed to form the plurality of die access trenches 20 inthe second main surface 32 b of the first semiconductor substrate 32.Each of the plurality of die access trenches 20 defines a respective oneof a plurality of intended die areas 22 defined on or in the first mainsurface 24 a of the second semiconductor substrate 24.

The first main surface 32 a may be ground and/or polished flat usingknown processes, such as mechanical or chemical grinding, etching and/orpolishing processes. Preferably, the handle wafer 32 is formed ofsilicon (Si). But, the handle wafer 32 may be formed of other materialssuch as gallium arsenide (GaAs), germanium (Ge) or the like. Preferably,the first main surface 32 a is ground and/or polished sufficiently toleave a polished, flat, clean surface, which is ideally defect free. Thesecond main surface 32 b may be lapped and etched using a known lappingand/or etching process. The handle wafer 32 is then oxidized to form theburied oxide layer 35. The buried oxide layer 35 is applied using one ofthermal growth, low pressure (LP) chemical vapor deposition (CVD),plasma enhanced chemical vapor deposition (PECVD), atmospheric pressurechemical vapor deposition (APCVD) and deposition. The buried oxide layer35 is preferably formed of an oxide. Alternatively, the buried oxidelayer 35 may be a nitride, silicon-oxynitride or other knowndielectrics. The buried oxide layer 35 on the handle wafer 32 may beformed by any known technique.

The device layer 24 can be formed by bonding or otherwise forming asemiconductor layer on the buried oxide layer 35. Preferably, the devicelayer 24 is silicon. But, the device layer 24 may be formed of othermaterials such as gallium arsenide, germanium or the like. For example,the device layer 24 is typically a doped p-type or n-type silicon layer.

The SOI wafer 10, as shown in plan view in FIG. 4, may be of anydimension or geometric shape. Typically, the SOI wafer 10 is generallycircular in plan view and has a diameter on the order of 25-300 mm ormore.

Known processing techniques such as grinding, polishing and etching maybe performed to obtain a desired thicknesses of the handle wafer 32,buried oxide layer 35 and device layer 24. Generally, semiconductorwafers 10 are coarsely thinned by a grinding machine having a roughgrinding wheel or grinding pad such as a diamond or carbide wheel or padhaving for example, diamond impregnated resin teeth. Grinding the wafer10 also allows for thinner, and therefore, smaller IC packages.Generally, polishing is a finer process using a wet silica-particleslurry which is washed across the surface of the SOI wafer 10 at apredetermined flow rate and is referred to as chemical mechanicalpolishing (CMP). Optionally, surfaces of the SOI wafer 10 are thinned bygrinding and then polishing.

The second main surface 32 b of the handle wafer 32 is masked and etchedaccording to specific patterns (see e.g., FIG. 4). Masking may beperformed by photolithography, electron lithography or the like, as isknown in the art. As shown in FIG. 3, the second main surface 32 b ofthe handle wafer 32 is then trenched by etching (i.e., removing unmaskedmaterial) to form a plurality of die access trenches 20 (FIG. 4).

Each of the die access trenches 20 in the handle wafer 32 exposes abackside of one of the respective intended die areas or dies 22. As bestshown in the bottom plan view of FIGS. 4-5, the full thickness of theremainder of the handle wafer surface is maintained to provide stabilityduring any remaining semiconductor processing steps and especiallyduring sawing or dicing. Preferably, as best shown in FIG. 3, etchingwill stop on the buried oxide layer 35 which can be subsequently removedif desired or remain to form a mask for future backside processes.Optionally, backside processing steps can be performed on the bottoms ofthe intended die areas or dies 22 to form, e.g., backside contacts orthe like (not shown). Sufficient space remains between adjacent dies 22so that sawing or dicing may be performed to separate the plurality ofdies 22 for individual packaging or the like.

Referring to FIG. 5, the intended die area or the active die 22 isexposed. Saw lines or cut lines 12 and 14 show the center of the cutline with allowance made on either side of the saw lines 12, 14 toaccommodate saw blade width, over cutting and material fracture. Theremaining portions of the handle wafer 35 and the edge of the active die22 are beyond the influence of the cutting tool, for example, saw blade,water jet, laser or the like. Each of the plurality of die accesstrenches 20 has a width dimension W₂₀ that is greater than a widthdimension W₂₂ of the respective one of the plurality of intended dieareas or dies 22. Preferably, the width dimension W₂₀ of each of theplurality of die access trenches 20 is greater than the width dimensionW₂₂ of the respective one of the plurality of intended die areas or dies22 by at least a saw/dice cutting tolerance. Likewise, Each of theplurality of die access trenches 20 has a height dimension H₂₀ that isgreater than a height dimension H₂₂ of the respective one of theplurality of intended die areas or dies 20. Preferably, the heightdimension H₂₀ of each of the plurality of die access trenches 20 isgreater than the height dimension H₂₂ of the respective one of theplurality of intended die areas or dies 22 by at least a saw/dicecutting tolerance. Thus, the die access trenches 20 are larger indimension than the active dies 22 by at least one “saw street width”around the perimeter of the die 22. A “saw street width” generally meansthe full dimensional width of a cut caused by a saw or grinding wheelwhich may be slightly wider than the blade or wheel itself due to anumber of factors such as ripping.

The plurality of die access trenches 20 may be formed in the second mainsurface 32B of the handle wafer 32 by a process such as plasma etching,reactive ion etching (RIE), sputter etching, vapor phase etching,chemical etching, deep RIE or the like. Utilizing deep RIE, die accesstrenches 20 can be formed having depths of about 40 to 300 μm or evendeeper.

The intended die areas or dies 22 and the die access trenches 20 aredepicted in FIG. 5 as generally rectangular in shape, but the dies 22and the die access trenches 20 may be other shapes such as square,ovoid, circular or the like.

Optionally, a given die access trench 20 may provide access to more thanone die 22.

Damage is more likely to occur to the SOI wafer 10 during sawing/dicingwhere loading changes dramatically, such as the transition between theexposed trench section 20 and the areas of remaining handle wafer 35.Accordingly, FIG. 6 shows a greatly enlarged bottom plan view of analternate embodiment of the SOI wafer 10 wherein the trenches 20 havestress relief trenches 16 partially formed along the along intendedcutting lines 12, 14 to improve sawing/dicing and reduce possible stresscaused thereby.

FIG. 7 shows a greatly enlarged bottom plan view of another alternateembodiment of the SOI wafer 10 wherein stress relief trenches 18 areprovided along the entire length of the along intended cutting lines 12,14 to improve sawing/dicing and reduce possible stress caused thereby.

From the foregoing, it can be seen that embodiments of the presentinvention are directed to methods for using a SOI semiconductor waferfor manufacturing devices having very thin and fragile substrates. Itwill be appreciated by those skilled in the art that changes could bemade to the embodiments described above without departing from the broadinventive concept thereof. It is understood, therefore, that thisinvention is not limited to the particular embodiments disclosed, but itis intended to cover modifications within the spirit and scope of thepresent invention as defined by the appended claims.

1. A semiconductor wafer comprising: a support substrate having firstand second main surfaces opposite to each other; a semiconductorsubstrate having a first main surface and a second main surface, thesecond main surface of the semiconductor substrate being disposed on thefirst main surface of the support substrate; a plurality of die areasdefined on the first main surface of the semiconductor substrate, theplurality of die areas being separated from one another; and a pluralityof die access trenches formed in the support substrate from the secondmain surface, each of the plurality of die access trenches having awidth dimension and a height dimension defining an area, each of theareas of the plurality of die access trenches defining at least arespective one of the plurality of die areas on the first main surfaceof the device layer.
 2. The semiconductor wafer according to claim 1,wherein each of the plurality of die access trenches has a widthdimension that is greater than a width dimension of the at leastrespective one of the plurality of intended die areas.
 3. Thesemiconductor wafer according to claim 2, wherein the width dimension ofeach of the plurality of die access trenches is greater than the widthdimension of the at least respective one of the plurality of intendeddie areas by at least a saw/dice cutting tolerance.
 4. The semiconductorwafer according to claim 1, wherein each of the plurality of die accesstrenches has a height dimension that is greater than a height dimensionof the at least respective one of the plurality of intended die areas.5. The semiconductor wafer according to claim 4, wherein the heightdimension of each of the plurality of die access trenches is greaterthan the height dimension of the at least respective one of theplurality of intended die areas by at least a saw/dice cuttingtolerance.
 6. The semiconductor wafer according to claim 1, furthercomprising: a plurality of stress relief trenches formed at leastpartially along intended cutting lines.
 7. The semiconductor waferaccording to claim 6, wherein the plurality of stress relief trenchesare formed substantially along intended cutting lines.
 8. Thesemiconductor wafer according to claim 1, further comprising adielectric layer disposed between the second main surface of thesemiconductor substrate and the first main surface of the supportsubstrate.
 9. The semiconductor wafer according to claim 8, wherein thedielectric layer is a buried oxide layer.
 10. The semiconductor waferaccording to claim 1, wherein a die is formed in each of the pluralityof intended die areas.
 11. A method of manufacturing semiconductordevices comprising: providing a support substrate having first andsecond main surfaces opposite to each other; providing a semiconductorsubstrate having first and second main surfaces opposite to each other,the semiconductor substrate being disposed on the first main surface ofthe support substrate; and selectively removing portions of the supportsubstrate to form a plurality of die access trenches in the second mainsurface of the support substrate, each of the plurality of die accesstrenches having a width dimension and a height dimension defining anarea, each of the areas of the plurality of die access trenches definingat least a respective one of a plurality of intended die areas definedon the first main surface of the semiconductor substrate.
 12. The methodaccording to claim 11, wherein the width dimension of each of theplurality of die access trenches is greater than a width dimension ofthe at least respective one of the plurality of intended die areas. 13.The method according to claim 12, wherein the width dimension of each ofthe plurality of die access trenches is greater than the width dimensionof the at least respective one of the plurality of intended die areas byat least a saw/dice cutting tolerance.
 14. The method according to claim11, wherein the height dimension of each of the plurality of die accesstrenches is greater than a height dimension of the at least respectiveone of the plurality of intended die areas.
 15. The method according toclaim 14, wherein the height dimension of each of the plurality of dieaccess trenches is greater than the height dimension of the at leastrespective one of the plurality of intended die areas by at least asaw/dice cutting tolerance.
 16. The method according to claim 11,further comprising: selectively removing portions of the supportsubstrate to form a plurality of stress relief trenches formed at leastpartially along intended cutting lines.
 17. The method according toclaim 16, wherein the plurality of stress relief trenches are formedsubstantially along intended cutting lines.
 18. The method according toclaim 11, further comprising: forming a dielectric layer on the firstmain surface of the first semiconductor substrate.
 19. The methodaccording to claim 18, wherein the dielectric layer is a buried oxidelayer.
 20. The method according to claim 11, wherein the plurality ofdie access trenches are formed by one of plasma etching, reactive ionetching (RIE), sputter etching, vapor phase etching and chemicaletching.
 21. The method according to claim 11, further comprising:performing at least one processing step on the first main surface of thesemiconductor substrate in order to provide a plurality of semiconductordies in at least some of the plurality of intended die areas.
 22. Themethod according to claim 11, wherein a die is formed in each of theplurality of intended die areas.
 23. A semiconductor device formed bythe method of claim
 11. 24. A semiconductor device formed by a methodcomprising: providing a first semiconductor substrate having first andsecond main surfaces opposite to each other; forming a dielectric layeron the first main surface of the first semiconductor substrate;providing a second semiconductor substrate having first and second mainsurfaces opposite to each other, the second semiconductor substratebeing disposed on the dielectric layer opposite to the firstsemiconductor substrate; and selectively removing portions of the firstsemiconductor substrate to form a plurality of die access trenches inthe second main surface of the first semiconductor substrate, each ofthe plurality of die access trenches having a width dimension and aheight dimension defining an area, each of the areas of the plurality ofdie access trenches defining at least a respective one of a plurality ofintended die areas defined on the first main surface of the secondsemiconductor substrate.